Metallurgical Grade Silicon to Polysilicon & Intermediate Products
Innovative steps lead from metallurgical grade silicon to polysilicon. In the monosilane process for production of polysilicon, recycling of intermediate products such as TCS and hydrogen is achieved by closed loops. The process is structured in a straight-forward way, consisting of three main production units:
Lowest Energy + Feedstock consumption = Lowest Operations Cost
Hydrochlorination Unit
Monosilane Disproportionation Unit
Chemical Vapor Deposition Unit (CVD)
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